BETOP Scientific Limited

White Light Interference Film Thickness Delta

Main parameters

brand：Betop

Model：Delta

Place of Origin：China

Description

Delta thin film thickness measurement system uses thin film interference optical principle to measure and analyze thin film thickness. The thin film surface is illuminated with a wide spectrum light source from deep ultraviolet to near infrared, and the probe receives the reflected light in the same position. Delta quickly inverts and calculates the thickness of the thin film based on the reflected interference light. The measuring range 1nm-3mm can complete the test of multilayer film thickness at the same time. For 100nm films, N and K values can also be measured.

Features

Fast, accurate, non-destructive, flexible, easy to use and cost-effective.

application area
01.Semiconductor (SiO2/SiNx, photoresist, MEMS, SOI, etc.)
02.LCD/TFT/PDP (liquid crystal cell thickness, polyamide ITO, etc.)
03.LED (SiO2, photoresist ITO, etc.)

01 02 03

04 05 06

04.Touch screen (ITO AR Coating reflection / penetration test, etc.)
05.Automobile (anti fog layer, Hard Coating DLC, etc.)
06.Medicine (PX coated balloon / catheter wall thick film, etc.)

Parameters

Model	Delta-VIS	Delta-EXR	Delta-DUV	Delta-XNIR
Wavelength range	380-1050nm	380-1700nm	190-1100nm	900-1700nm
Thickness range	50nm-40um	50nm-300um	1nm-30um	10um-3mm
^Accuracy¹	2nm	2nm	1nm	10nm
accuracy	0.2nm	0.2nm	0.2nm	3nm
Angle of incidence	0 degrees	0 degrees	0 degrees	0 degrees
Sample material	Transparent or translucent	Transparent or translucent	Transparent or translucent	Transparent or translucent
Measurement mode	Reflection / transmission	Reflection / transmission	Reflection / transmission	Reflection / transmission
Spot size²	2mm	2mm	2mm	2mm
Can it be online?	yes	yes	yes	yes
Scanning selection	XY optional	XY optional	XY optional	XY optional

notes:1. depends on the larger material between 0.4% or 2mm.

2. optional light spot accessories.